The messages supported by each equipment profile capability are shown in the following table.
CFX capability message | CFX message |
Basic Recipe Validation | RecipeActivated |
Unit Status Validation | ValidateUnitsRequest |
Unit Status Validation | ValidateUnitsResponse |
WIP Tracking | WorkStarted |
WIP Tracking | WorkCompleted |
WIP Tracking with Stages | WorkStageStarted |
WIP Tracking with Stages | WorkStageCompleted |
Production Unit Test | UnitsTested |
Production Unit Inspection | UnitsInspected |
Unit Disqualification / Scrapping | UnitsDisqualified |
Equipment Data Tracking | ReadingsRecorded |
Station Performance Reporting | FaultOccurred |
Station Performance Reporting | FaultCleared |
Station Performance Reporting | LogEntryRecorded |
Station Performance Reporting | StationStateChanged |
Event triggers
| Note | ||||
|---|---|---|---|---|
| ||||
The CFX Gateway supports two handshake protocols: single handshake and double handshake. |
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